Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256074 | Exposure apparatus and exposure method | Akio Yamada, Shinji Sugatani, Masaki Kurokawa | 2019-04-09 |
| 9977337 | Exposure apparatus and exposure method | Shoji Kojima, Akio Yamada | 2018-05-22 |
| 9859099 | Exposure apparatus and exposure method | Akio Yamada, Hideki Nasuno | 2018-01-02 |
| 9734988 | Exposure apparatus and exposure method | Akio Yamada, Shinji Sugatani, Masaki Kurokawa | 2017-08-15 |
| 9607807 | Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same | Akio Yamada, Tatsuro Okawa, Masaki Kurokawa | 2017-03-28 |
| 7262410 | Sample observing apparatus and sample observing method | Masayuki Kuribara, Toshihiko Hara, Kazuhiro Arakawa, Toshimichi Iwai | 2007-08-28 |
| 6163159 | Charged particle beam test system | — | 2000-12-19 |