Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8530836 | Electron-beam dimension measuring apparatus and electron-beam dimension measuring method | — | 2013-09-10 |
| 7663103 | Line-width measurement adjusting method and scanning electron microscope | Jun Matsumoto | 2010-02-16 |
| 7560693 | Electron-beam size measuring apparatus and size measuring method with electron beams | — | 2009-07-14 |
| 7262410 | Sample observing apparatus and sample observing method | Masahiro Seyama, Toshihiko Hara, Kazuhiro Arakawa, Toshimichi Iwai | 2007-08-28 |
| 6445197 | Electron beam tester, recording medium therefor and signal data detecting method | — | 2002-09-03 |
| 6326798 | Electric beam tester and image processing apparatus | — | 2001-12-04 |
| 5633595 | IC analysis system and electron beam probe system and fault isolation method therefor | Koshi Ueda, Akira Goishi | 1997-05-27 |
| 5592099 | IC tester joined with ion beam tester and the detection method of the failure part of IC | Akira Goishi, Koshi Ueda | 1997-01-07 |
| 5589780 | IC Analysis system and electron beam probe system and fault isolation method therefor | Koshi Ueda, Akira Goishi | 1996-12-31 |
| 5528156 | IC analysis system and electron beam probe system and fault isolation method therefor | Koshi Ueda, Akira Goishi | 1996-06-18 |