Issued Patents All Time
Showing 26–50 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6907740 | Gas charging system for fill of gas storage and dispensing vessels | — | 2005-06-21 |
| 6833024 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Jose I. Arno, Ray Dubois | 2004-12-21 |
| 6764755 | Channelized sorbent media, and methods of making same | Steven J. Hultquist | 2004-07-20 |
| 6749671 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Jose I. Arno, Rebecca Faller | 2004-06-15 |
| 6735978 | Treatment of supercritical fluid utilized in semiconductor manufacturing applications | Michael B. Korzenski, Eliodor G. Ghenciu, Chongying Xu, Thomas H. Baum | 2004-05-18 |
| 6660063 | Sorbent-based gas storage and delivery system | James V. McManus, Luping Wang, W. Karl Olander | 2003-12-09 |
| 6620256 | Non-plasma in-situ cleaning of processing chambers using static flow methods | Jose I. Arno, Luping Wang | 2003-09-16 |
| 6540819 | Gas cabinet assembly comprising sorbent-based gas storage and delivery system | James V. McManus | 2003-04-01 |
| 6540814 | Integrated ion implant scrubber system | Michael W. Hayes, Mark Holst, Jose I. Arno | 2003-04-01 |
| 6537353 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Jose I. Arno, Rebecca Faller | 2003-03-25 |
| 6500487 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Jose I. Arno, Ray Dubois | 2002-12-31 |
| 6474076 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Luping Wang, James Dietz, Steven M. Lurcott, Steven J. Hultquist | 2002-11-05 |
| 6406519 | Gas cabinet assembly comprising sorbent-based gas storage and delivery system | James V. McManus | 2002-06-18 |
| 6391385 | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Jose I. Arno, Rebecca Faller | 2002-05-21 |
| 6360546 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Luping Wang, James Dietz, Steven M. Lurcott, Steven J. Hultquist | 2002-03-26 |
| 6343476 | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein | Luping Wang | 2002-02-05 |
| 6295861 | Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same | Mackenzie King | 2001-10-02 |
| 6204180 | Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery | Peter S. Kirlin, James V. McManus | 2001-03-20 |
| 6196052 | Piezoelectric gas sensing device for detection of a gas species a gaseous environment | Iain May | 2001-03-06 |
| 6156578 | Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream | — | 2000-12-05 |
| 6132492 | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same | Steven J. Hultquist, Peter S. Kirlin, James V. McManus | 2000-10-17 |
| 6125131 | Laser system utilizing sorbent-based gas storage and delivery system | George R. Brandes, James V. McManus | 2000-09-26 |
| 6110257 | Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system | — | 2000-08-29 |
| 6101816 | Fluid storage and dispensing system | Luping Wang | 2000-08-15 |
| 6089027 | Fluid storage and dispensing system | Luping Wang | 2000-07-18 |