Issued Patents 2025
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416853 | EUV photo masks and manufacturing method thereof | Pei-Cheng Hsu, Ta-Cheng Lien | 2025-09-16 |
| 12400864 | Methods and systems for improving plasma ignition stability | Ping-Hsun Lin, Hung-Yi Tsai, Hao-Ping Cheng, Ta-Cheng Lien | 2025-08-26 |
| 12393129 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Kuan-Wen Lin +1 more | 2025-08-19 |
| 12393124 | High throughput and high position accurate method for particle inspection of mask pods | Shih-Jui Huang, ShinAn KU, Ting-Hao Hsu | 2025-08-19 |
| 12366798 | Lithography mask and methods | Chien-Cheng Chen, Huan-Ling Lee, Ta-Cheng Lien, Chia-Jen Chen | 2025-07-22 |
| 12366797 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Ping-Hsun Lin, Hao-Ping Cheng +2 more | 2025-07-22 |
| 12353120 | EUV photo masks and manufacturing method thereof | Wei-Che Hsieh, Chi-Lun Lu, Ping-Hsun Lin, Fu-Sheng Chu, Ta-Cheng Lien | 2025-07-08 |
| 12346019 | Reflective mask | Pei-Cheng Hsu, Ta-Cheng Lien | 2025-07-01 |
| 12346021 | Simultaneous carbon nanotube growth, catalyst removal, boron nitride nanotube shell formation method for EUV pellicles | Pei-Cheng Hsu, Huan-Ling Lee, Chin-Hsiang Lin | 2025-07-01 |
| 12346020 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ping-Hsun Lin, Ta-Cheng Lien | 2025-07-01 |
| 12346023 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ping-Hsun Lin, Ta-Cheng Lien | 2025-07-01 |
| 12346027 | Methods of making a semiconductor device | Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Ta-Cheng Lien | 2025-07-01 |
| 12339579 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Chun-Fu Yang, Ta-Cheng Lien | 2025-06-24 |
| 12339582 | Photomask including fiducial mark and method of making a photomask | Ping-Hsun Lin, Chih-Cheng Lin, Chia-Jen Chen | 2025-06-24 |
| 12298673 | Method of manufacturing photo masks | Chien-Cheng Chen, Chia-Jen Chen, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2025-05-13 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen | 2025-04-01 |
| 12259649 | Cleaning method for photo masks and apparatus therefor | Pei-Cheng Hsu, Hao-Ping Cheng, Ta-Cheng Lien | 2025-03-25 |