Issued Patents 2025
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416853 | EUV photo masks and manufacturing method thereof | Pei-Cheng Hsu, Hsin-Chang Lee | 2025-09-16 |
| 12400864 | Methods and systems for improving plasma ignition stability | Ping-Hsun Lin, Hung-Yi Tsai, Hao-Ping Cheng, Hsin-Chang Lee | 2025-08-26 |
| 12366797 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Hsin-Chang Lee, Ping-Hsun Lin, Hao-Ping Cheng +2 more | 2025-07-22 |
| 12366798 | Lithography mask and methods | Chien-Cheng Chen, Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2025-07-22 |
| 12353120 | EUV photo masks and manufacturing method thereof | Wei-Che Hsieh, Chi-Lun Lu, Ping-Hsun Lin, Fu-Sheng Chu, Hsin-Chang Lee | 2025-07-08 |
| 12346020 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ping-Hsun Lin, Hsin-Chang Lee | 2025-07-01 |
| 12346027 | Methods of making a semiconductor device | Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee | 2025-07-01 |
| 12346023 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ping-Hsun Lin, Hsin-Chang Lee | 2025-07-01 |
| 12346019 | Reflective mask | Pei-Cheng Hsu, Hsin-Chang Lee | 2025-07-01 |
| 12339579 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Chun-Fu Yang, Hsin-Chang Lee | 2025-06-24 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ching-Fang Yu, Chia-Jen Chen, Hsin-Chang Lee | 2025-04-01 |
| 12259649 | Cleaning method for photo masks and apparatus therefor | Hsin-Chang Lee, Pei-Cheng Hsu, Hao-Ping Cheng | 2025-03-25 |