Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400864 | Methods and systems for improving plasma ignition stability | Ping-Hsun Lin, Hung-Yi Tsai, Ta-Cheng Lien, Hsin-Chang Lee | 2025-08-26 |
| 12366797 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin +2 more | 2025-07-22 |
| 12259649 | Cleaning method for photo masks and apparatus therefor | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2025-03-25 |