Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400864 | Methods and systems for improving plasma ignition stability | Hung-Yi Tsai, Hao-Ping Cheng, Ta-Cheng Lien, Hsin-Chang Lee | 2025-08-26 |
| 12366797 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Hao-Ping Cheng +2 more | 2025-07-22 |
| 12353120 | EUV photo masks and manufacturing method thereof | Wei-Che Hsieh, Chi-Lun Lu, Fu-Sheng Chu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-08 |
| 12346023 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346020 | Optical assembly with coating and methods of use | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12339582 | Photomask including fiducial mark and method of making a photomask | Hsin-Chang Lee, Chih-Cheng Lin, Chia-Jen Chen | 2025-06-24 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2025-04-01 |