Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366797 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin, Hao-Ping Cheng +2 more | 2025-07-22 |
| 12353120 | EUV photo masks and manufacturing method thereof | Chi-Lun Lu, Ping-Hsun Lin, Fu-Sheng Chu, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-08 |
| 12261036 | Forming low-stress silicon nitride layer through hydrogen treatment | Ching-Yu Huang, Hsin-Hao Yeh, Chunyao Wang, Tze-Liang Lee | 2025-03-25 |