Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416853 | EUV photo masks and manufacturing method thereof | Ta-Cheng Lien, Hsin-Chang Lee | 2025-09-16 |
| 12346019 | Reflective mask | Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346020 | Optical assembly with coating and methods of use | Ping-Hsun Lin, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346021 | Simultaneous carbon nanotube growth, catalyst removal, boron nitride nanotube shell formation method for EUV pellicles | Huan-Ling Lee, Hsin-Chang Lee, Chin-Hsiang Lin | 2025-07-01 |
| 12346023 | Optical assembly with coating and methods of use | Ping-Hsun Lin, Ta-Cheng Lien, Hsin-Chang Lee | 2025-07-01 |
| 12346027 | Methods of making a semiconductor device | Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee, Ta-Cheng Lien | 2025-07-01 |
| 12339579 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Chun-Fu Yang, Ta-Cheng Lien, Hsin-Chang Lee | 2025-06-24 |
| 12265322 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2025-04-01 |
| 12259649 | Cleaning method for photo masks and apparatus therefor | Hsin-Chang Lee, Hao-Ping Cheng, Ta-Cheng Lien | 2025-03-25 |