Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400863 | Method for etching for semiconductor fabrication | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Motoi Takahashi, Masahiko Yokoi +2 more | 2025-08-26 |
| 12368027 | Substrate processing method and substrate processing apparatus | Ryutaro SUDA, Yoshihide Kihara, Maju TOMURA, Kae KUMAGAI | 2025-07-22 |
| 12347651 | Etching method and plasma processing apparatus | Koki Tanaka, Ryu NAGAI, Ryutaro SUDA | 2025-07-01 |
| 12198938 | Etching method | Ryutaro SUDA, Maju TOMURA, Yoshihide Kihara | 2025-01-14 |