Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400863 | Method for etching for semiconductor fabrication | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Takatoshi Orui, Motoi Takahashi +2 more | 2025-08-26 |
| 12368050 | Plasma processing method and plasma processing apparatus | Koki Tanaka | 2025-07-22 |
| 12308212 | In-situ adsorbate formation for plasma etch process | Du Zhang, Yu-Hao Tsai, Yoshihide Kihara, Mingmei Wang | 2025-05-20 |