Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424447 | Method to selectively etch silicon nitride to silicon oxide using water crystallization | Yu-Hao Tsai, Du Zhang | 2025-09-23 |
| 12400863 | Method for etching for semiconductor fabrication | Yu-Hao Tsai, Du Zhang, Takatoshi Orui, Motoi Takahashi, Masahiko Yokoi +2 more | 2025-08-26 |
| 12308212 | In-situ adsorbate formation for plasma etch process | Du Zhang, Yu-Hao Tsai, Masahiko Yokoi, Yoshihide Kihara | 2025-05-20 |
| 12237172 | Etch process for oxide of alkaline earth metal | Du Zhang, Christophe Vallee | 2025-02-25 |