Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368027 | Substrate processing method and substrate processing apparatus | Takatoshi Orui, Yoshihide Kihara, Maju TOMURA, Kae KUMAGAI | 2025-07-22 |
| 12347651 | Etching method and plasma processing apparatus | Koki Tanaka, Ryu NAGAI, Takatoshi Orui | 2025-07-01 |
| 12341020 | Substrate processing method and substrate processing apparatus | Maju TOMURA | 2025-06-24 |
| 12198938 | Etching method | Takatoshi Orui, Maju TOMURA, Yoshihide Kihara | 2025-01-14 |