Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412749 | Etching method and plasma processing system | Yoshihide Kihara | 2025-09-09 |
| 12400835 | Plasma processing method and plasma processing system | Satoshi OHUCHIDA, Koki MUKAIYAMA, Noboru Saito, Yoshihide Kihara | 2025-08-26 |
| 12387941 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Yoshihide Kihara, Satoshi OHUCHIDA | 2025-08-12 |
| 12387936 | Plasma processing method and plasma processing system | Kae Takahashi, Yoshihide Kihara | 2025-08-12 |
| 12368027 | Substrate processing method and substrate processing apparatus | Takatoshi Orui, Ryutaro SUDA, Yoshihide Kihara, Kae KUMAGAI | 2025-07-22 |
| 12341020 | Substrate processing method and substrate processing apparatus | Ryutaro SUDA | 2025-06-24 |
| 12198938 | Etching method | Takatoshi Orui, Ryutaro SUDA, Yoshihide Kihara | 2025-01-14 |