Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400835 | Plasma processing method and plasma processing system | Koki MUKAIYAMA, Noboru Saito, Yoshihide Kihara, Maju TOMURA | 2025-08-26 |
| 12387941 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara | 2025-08-12 |