Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347651 | Etching method and plasma processing apparatus | Koki Tanaka, Takatoshi Orui, Ryutaro SUDA | 2025-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347651 | Etching method and plasma processing apparatus | Koki Tanaka, Takatoshi Orui, Ryutaro SUDA | 2025-07-01 |