Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Silverst Rodrigues, Yang Yang | 2025-06-17 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more | 2025-01-07 |