Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405539 | Substrate support and substrate table | Coen Hubertus Matheus Baltis, Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen, Frank Pieter Albert Van Den Berkmortel, Niek Jacobus Johannes Roset +3 more | 2025-09-02 |
| 12315756 | Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use | Michael Marinus Anna STEUR, Nicolaas Ten Kate, Koen Gerhardus Winkels, Antonius Franciscus Johannes De Groot | 2025-05-27 |
| 12287586 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie +1 more | 2025-04-29 |