Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315756 | Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use | Michael Marinus Anna STEUR, Nicolaas Ten Kate, Siegfried Alexander Tromp, Koen Gerhardus Winkels | 2025-05-27 |