Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315756 | Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use | Michael Marinus Anna STEUR, Nicolaas Ten Kate, Siegfried Alexander Tromp, Antonius Franciscus Johannes De Groot | 2025-05-27 |
| 12242204 | Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate | Ruud Antonius Catharina Maria Beerens, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Dennis Dominic VAN DER VOORT, Edwin Johannes Cornelis Bos +2 more | 2025-03-04 |