Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12242204 | Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate | Koen Gerhardus Winkels, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Dennis Dominic VAN DER VOORT, Edwin Johannes Cornelis Bos +2 more | 2025-03-04 |