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Substrate support and substrate table |
Coen Hubertus Matheus Baltis, Marcus Martinus Petrus Adrianus Vermeulen, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel, Niek Jacobus Johannes Roset +3 more |
2025-09-02 |
| 12366808 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2025-07-22 |
| 12353139 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2025-07-08 |
| 12315756 |
Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of use |
Michael Marinus Anna STEUR, Siegfried Alexander Tromp, Koen Gerhardus Winkels, Antonius Franciscus Johannes De Groot |
2025-05-27 |
| 12242204 |
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate |
Ruud Antonius Catharina Maria Beerens, Koen Gerhardus Winkels, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Dennis Dominic VAN DER VOORT +2 more |
2025-03-04 |
| 12242206 |
Method for preparing a substrate and lithographic apparatus |
Dennis Dominic VAN DER VOORT |
2025-03-04 |
| 12204255 |
Lithographic apparatus and method |
Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino, Marinus Jan Remie +3 more |
2025-01-21 |