Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366808 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2025-07-22 |
| 12353139 | Substrate holder and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2025-07-08 |
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen +2 more | 2025-01-07 |