Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, David Robert Evans +2 more | 2025-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, Jonghoon Baek, John Tom Stewart, IV, Andrew David LaForge, David Robert Evans +2 more | 2025-01-07 |