Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405539 | Substrate support and substrate table | Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel, Niek Jacobus Johannes Roset +3 more | 2025-09-02 |
| 12321104 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Abraham Alexander Soethoudt, Mehmet Ali AKBAS, Dennis Van Den Berg, Wouter VANESCH +1 more | 2025-06-03 |
| 12306433 | Hollow-core photonic crystal fiber based optical component for broadband radiation generation | Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Janneke Ravensbergen | 2025-05-20 |