Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12321104 | Substrate holder for use in a lithographic apparatus | Thomas POIESZ, Coen Hubertus Matheus Baltis, Abraham Alexander Soethoudt, Dennis Van Den Berg, Wouter VANESCH +1 more | 2025-06-03 |
| 12189310 | Systems and methods for manufacturing a double-sided electrostatic clamp | Matthew Lipson | 2025-01-07 |