Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287586 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Stef Marten Johan Janssens, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie, Theresa Mary Spaan-Burke +1 more | 2025-04-29 |