Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287570 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens, Jeroen Gerard Gosen +4 more | 2025-04-29 |
| 12287586 | Stage system, lithographic apparatus, method for positioning and device manufacturing method | Bert Dirk SCHOLTEN, Sjoerd Nicolaas Lambertus Donders, Teunis Van Dam, Peter Mark Overschie, Theresa Mary Spaan-Burke +1 more | 2025-04-29 |