Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354891 | Particle beam inspection apparatus | Te-Yu Chen, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk, Martijn Petrus Christianus Van Heumen, Erheng WANG +1 more | 2025-07-08 |
| 12287570 | Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus | Stef Marten Johan Janssens, Koen Cuypers, Rogier Hendrikus Magdalena Cortie, Sudhir Srivastava, Theodorus Johannes Antonius Renckens +4 more | 2025-04-29 |
| 12217930 | Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus | Martijn Petrus Christianus Van Heumen | 2025-02-04 |