Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Yasuhiko Kojima, Einstein Noel Abarra | 2024-12-17 |
| 12163215 | Film forming apparatus and film forming method | Koji Maeda, Atsushi Shimada, Katsushi OIKAWA | 2024-12-10 |
| 12033878 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Naoki Watanabe, Naoyuki Suzuki | 2024-07-09 |
| 12002667 | Sputtering apparatus and method of controlling sputtering apparatus | Masato SHINADA, Einstein Noel Abarra | 2024-06-04 |
| 11901166 | Magnetron sputtering apparatus and magnetron sputtering method | Kanto Nakamura, Yusuke Kikuchi | 2024-02-13 |