Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002667 | Sputtering apparatus and method of controlling sputtering apparatus | Tetsuya Miyashita, Einstein Noel Abarra | 2024-06-04 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Tamaki Takeyama, Kazunaga ONO, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |