Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Kazunaga ONO, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |