Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033878 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Tetsuya Miyashita, Naoki Watanabe | 2024-07-09 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Tamaki Takeyama, Kazunaga ONO, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |