Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183612 | Substrate transfer apparatus, substrate transfer method, and substrate processing system | Naoki Watanabe | 2024-12-31 |
| 12033878 | Substrate transfer apparatus and substrate processing system | Tetsuya Miyashita, Naoki Watanabe, Naoyuki Suzuki | 2024-07-09 |
| 11990357 | Substrate transport apparatus, substrate transport method, and substrate processing system | Naoki Watanabe | 2024-05-21 |