Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Yasuhiko Kojima, Tetsuya Miyashita | 2024-12-17 |
| 12002667 | Sputtering apparatus and method of controlling sputtering apparatus | Masato SHINADA, Tetsuya Miyashita | 2024-06-04 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Tamaki Takeyama, Kazunaga ONO, Naoyuki Suzuki, Hiroaki Chihaya | 2024-03-26 |