Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Einstein Noel Abarra, Tetsuya Miyashita | 2024-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Einstein Noel Abarra, Tetsuya Miyashita | 2024-12-17 |