Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180580 | Film forming position misalignment correction method and film forming system | Atsushi Takeuchi, Kanto Nakamura, Atsushi Gomi | 2024-12-31 |
| 12018928 | Film thickness measurement method, film thickness measurement device, and film formation system | Kanto Nakamura, Toru Kitada, Atsushi Gomi | 2024-06-25 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Tamaki Takeyama, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |