Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180580 | Film forming position misalignment correction method and film forming system | Atsushi Takeuchi, Kazunaga ONO, Atsushi Gomi | 2024-12-31 |
| 12077848 | Vacuum processing apparatus | Hiroyuki Yokohara, Yuki Motomura | 2024-09-03 |
| 12018928 | Film thickness measurement method, film thickness measurement device, and film formation system | Kazunaga ONO, Toru Kitada, Atsushi Gomi | 2024-06-25 |
| 11901166 | Magnetron sputtering apparatus and magnetron sputtering method | Tetsuya Miyashita, Yusuke Kikuchi | 2024-02-13 |
| 11894222 | Film forming apparatus and film forming method | Atsushi Takeuchi, Toru Kitada, Atsushi Gomi | 2024-02-06 |