Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180580 | Film forming position misalignment correction method and film forming system | Atsushi Takeuchi, Kazunaga ONO, Kanto Nakamura | 2024-12-31 |
| 12018928 | Film thickness measurement method, film thickness measurement device, and film formation system | Kazunaga ONO, Kanto Nakamura, Toru Kitada | 2024-06-25 |
| 11894222 | Film forming apparatus and film forming method | Atsushi Takeuchi, Toru Kitada, Kanto Nakamura | 2024-02-06 |