Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018928 | Film thickness measurement method, film thickness measurement device, and film formation system | Kazunaga ONO, Kanto Nakamura, Atsushi Gomi | 2024-06-25 |
| 11894222 | Film forming apparatus and film forming method | Atsushi Takeuchi, Kanto Nakamura, Atsushi Gomi | 2024-02-06 |