KO

Katsushi OIKAWA

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #391,631 of 561,600Top 70%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12163215 Film forming apparatus and film forming method Koji Maeda, Atsushi Shimada, Tetsuya Miyashita 2024-12-10