Issued Patents 2024
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172263 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2024-12-24 |
| 12159925 | Semiconductor device and method | Ji-Yin Tsai, Jung-Jen Chen, Pei-Ren Jeng, Chii-Horng Li, Yee-Chia Yeo | 2024-12-03 |
| 12158332 | Thin film metrology | Chih-Hung Chen, Te-Ming Kung | 2024-12-03 |
| 12131896 | Method for wafer backside polishing | Chih-Hung Chen | 2024-10-29 |
| 12128455 | Electrical cleaning tool for wafer polishing tool system | Chih-Wen Liu, Yeo-Sin Lin, Shu-Wei Hsu, Che-Hao Tu, Hui-Chi Huang | 2024-10-29 |
| 12132107 | Semiconductor structure and methods of forming same | Chun Hsiung Tsai, Kuo-Feng Yu | 2024-10-29 |
| 12131944 | Slurry composition, semiconductor structure and method for forming the same | Chun-Wei Hsu, Chih-Chieh Chang, Yi-Sheng Lin, Jian-Ci Lin, Jeng-Chi Lin +4 more | 2024-10-29 |
| 12087590 | Self-healing polishing pad | Chun-Hao Kung, Hui-Chi Huang, Yen-Ting Chen | 2024-09-10 |
| 12068195 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Ying-Lang Wang, Su-Hao Liu +5 more | 2024-08-20 |
| 12068196 | Forming gate line-end of semiconductor structures with improved metal gate height | Che-Liang Chung, Che-Hao Tu, Chih-Wen Liu, You-Shiang Lin, Yi-Ching Liang | 2024-08-20 |
| 12068169 | Semiconductor processing tool and methods of operation | Ji Cui, Chih-Hung Chen, Liang-Guang Chen | 2024-08-20 |
| 12046661 | Fin-type field effect transistor | Chun Hsiung Tsai | 2024-07-23 |
| 12036636 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Hui-Chi Huang | 2024-07-16 |
| 12030159 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Hui-Chi Huang | 2024-07-09 |
| 12021117 | Semiconductor structure and method of forming the same | Te-Ming Kung, Ying-Lang Wang, Wen-Hsi Lee, Shu-Wei Chang | 2024-06-25 |
| 12002854 | Semiconductor device and method of manufacture | Heng-Wen Ting, Chii-Horng Li, Pei-Ren Jeng, Hsueh-Chang Sung, Yen-Ru Lee +1 more | 2024-06-04 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2024-06-04 |
| 11991936 | Method of forming a FinFET device | Chang-Miao Liu, Bwo-Ning Chen | 2024-05-21 |
| 11984323 | CMP system and method of use | Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih-Hung Chen, William Weilun Hong | 2024-05-14 |
| 11964358 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Chun-Hao Kung, Ching-Hsiang Tsai, Hui-Chi Huang | 2024-04-23 |
| 11951587 | Zone-based CMP target control | Che-Liang Chung, Che-Hao Tu, Chih-Wen Liu | 2024-04-09 |
| 11929398 | FinFET structure and method for manufacturing thereof | Chun Hsiung Tsai, Lai-Wan Chong, Chien-Wei Lee | 2024-03-12 |
| 11904430 | Temperature control in chemical mechanical polish | Chih-Hung Chen | 2024-02-20 |