Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1049647 | Crevice brush | — | 2024-11-05 |
| 12128455 | Electrical cleaning tool for wafer polishing tool system | Chih-Wen Liu, Yeo-Sin Lin, Shu-Wei Hsu, Che-Hao Tu, Kei-Wei Chen | 2024-10-29 |
| 12087590 | Self-healing polishing pad | Chun-Hao Kung, Kei-Wei Chen, Yen-Ting Chen | 2024-09-10 |
| 12036636 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Kei-Wei Chen | 2024-07-16 |
| 12030159 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Kei-Wei Chen | 2024-07-09 |
| 11964358 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Chun-Hao Kung, Ching-Hsiang Tsai, Kei-Wei Chen | 2024-04-23 |