Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12036636 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Hui-Chi Huang, Kei-Wei Chen | 2024-07-16 |
| 11964358 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Chun-Hao Kung, Kei-Wei Chen, Hui-Chi Huang | 2024-04-23 |