Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087590 | Self-healing polishing pad | Hui-Chi Huang, Kei-Wei Chen, Yen-Ting Chen | 2024-09-10 |
| 12036636 | Mega-sonic vibration assisted chemical mechanical planarization | Shang-Yu Wang, Ching-Hsiang Tsai, Hui-Chi Huang, Kei-Wei Chen | 2024-07-16 |
| 11964358 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Ching-Hsiang Tsai, Kei-Wei Chen, Hui-Chi Huang | 2024-04-23 |