Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984323 | CMP system and method of use | Yu-Ting Yen, Cheng-Yu Kuo, Chih-Hung Chen, William Weilun Hong, Kei-Wei Chen | 2024-05-14 |
| 11865666 | CMP polishing head design for improving removal rate uniformity | Ching-Hong Jiang, Kuo-Yin Lin, Ming-Shiuan She, Shen-Nan Lee, Teng-Chun Tsai +1 more | 2024-01-09 |