Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172263 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2024-12-24 |
| 12170195 | Post-CMP cleaning and apparatus | Liang-Guang Chen, Ting-Kui Chang, Chun-Chieh Lin | 2024-12-17 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2024-06-04 |