Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2024-12-10 |
| 12131902 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yukinori Aburatani, Tetsuo Yamamoto | 2024-10-29 |
| 12106998 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Teruo Yoshino, Masanori NAKAYAMA | 2024-10-01 |
| 12091751 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomihiro Amano, Satoshi Takano | 2024-09-17 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2024-09-17 |
| 11967513 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki | 2024-04-23 |
| 11926893 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium therefor | Tetsuaki INADA | 2024-03-12 |
| 11923173 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Tadashi Takasaki | 2024-03-05 |
| 11891697 | Substrate processing apparatus | Takashi Yahata, Yukinori Aburatani, Shun MATSUI | 2024-02-06 |