Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2024-12-10 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2024-09-17 |
| 11967513 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi | 2024-04-23 |
| 11923173 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Naofumi Ohashi | 2024-03-05 |