Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2024-12-10 |